| Код | Диапазон | Увеличение | Цель | Точность осей X/Y | Разрешение по осям X/Y/Z |
|---|---|---|---|---|---|
| ISD-P222 | 200×200×200mm | 25X~338X (on 22'' monitor) | 0.6X~8.0X (zoom) | ≤(1.4+L/200)µm | 0.1µm |
| ISD-P322 | 300×200×200mm | 25X~338X (on 22'' monitor) | 0.6X~8.0X (zoom) | ≤(1.4+L/200)µm | 0.1µm |
| ISD-P432 | 400×300×200mm | 25X~338X (on 22'' monitor) | 0.6X~8.0X (zoom) | ≤(1.4+L/200)µm | 0.1µm |
| ISD-P433 | 400×300×300mm | 25X~338X (on 22'' monitor) | 0.6X~8.0X (zoom) | ≤(1.4+L/200)µm | 0.1µm |




